LunCH Lecture – ASML

ASML lithography systems are used to produce microchips with nanometer accuracy. This is only possible because of the large number of the intricate math-based software solutions that are used to optimize the performance of these complex machines. This lecture will give a glimpse into Mathematical problems that arise when trying to squeeze every last nanometer out of ASML’s lithography systems.

By Paul Donkers – former math student at the TUDelft and member of CH